Performance comparison of three-degree-of-freedom micro-positioning platforms for perfect circular, 1


This study focuses on analyzing the influence of different flexible hinge forms on the performance of a micro-positioning platform. The static and dynamic characteristics of platforms with perfect circle, ellipse, right angle, and triangular flexible hinges are compared using finite element software ANSYS. The following conclusions are drawn from the analysis: different platforms exhibit varying levels of flexibility, with the right-angle hinge platform being the most flexible and the triangular hinge platform being the least flexible. The perfect circle and ellipse flexible hinges have similar flexibility. The hinge form significantly affects the platform's motion performance, with the right-angle flexible hinge platform having a smaller rotation angle compared to other platforms. There are differences in displacement sensitivity among the different hinge platforms, with the circular hinge platform exhibiting higher sensitivity in all directions. The flexible hinge form also influences the natural frequency of the platform, with the right-angle hinge platform having the smallest natural frequency and the triangular hinge platform having the largest. The perfect circle and ellipse flexible hinges exhibit similar flexibility in terms of natural frequency. Considering the performance of different flexible hinge platforms, the circular hinge platform demonstrates better overall performance.

Micro-nano-level positioning workbenches play a crucial role in various fields such as precision machining, precision measurement, microelectronics engineering, bioengineering, nanoscience, and technology. These platforms require micro-nano-level positioning accuracy, excellent stability, stiffness, and fast response. Compliant mechanisms, which use flexible hinges instead of traditional kinematic pairs, have emerged as a new type of transmission structure. They utilize elastic deformation of flexible hinges to transmit motion and force, offering advantages such as no mechanical friction, no gap, high motion sensitivity, and simple processing. Compliant mechanisms are particularly suitable for transmission mechanisms in the field of precision positioning. The compliant mechanism works closely with the parallel mechanism, which strengthens and complements the advantages and disadvantages of the compliant mechanism. The combination of the two can meet the requirements for precision operation and positioning, including high motion resolution, fast response, and small size. The parallel structure is more compact and takes up less space compared to the series structure. In conclusion, compliant parallel mechanisms offer advantages such as high precision, high rigidity, compact structure, good symmetry, high speed, large self-weight load, and good dynamic performance. Since the micro-positioning platform relies on the deformation of flexible hinges, the choice of hinge form plays a crucial role in its performance. This study aims to design four different 3-RRR compliant parallel mechanisms with flexible hinges and compare their static and dynamic characteristics using finite element analysis software. The results of this analysis provide insights into the selection of the flexible hinge form for compliant parallel mechanisms.

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